Low resistance ohmic contacts on AlGaN/GaN structures using...

Applied Physics Letters 1999 Vol. 74; Iss. 18

Low resistance ohmic contacts on AlGaN/GaN structures using implantation and the “advancing” Al/Ti metallization

Qiao, D., Guan, Z. F., Carlton, J., Lau, S. S., Sullivan, G. J.
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Volume:
74
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.123927
File:
PDF, 404 KB
english, 1999
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