SPIE Proceedings [SPIE 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012) - Xiamen, China (Thursday 26 April 2012)] 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Design and analysis of hologram alignment mark
Li, Shijie, Wu, Fan, Chen, Qiang, Zhang, Yudong, Xiang, Libin, To, SandyVolume:
8417
Year:
2012
Language:
english
DOI:
10.1117/12.971196
File:
PDF, 857 KB
english, 2012