Thermal Decomposition Pathways and Rates for Silane, Chlorosilane, Dichlorosilane, and Trichlorosilane
Walch, Stephen P., Dateo, Christopher E.Volume:
105
Language:
english
Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/jp003559u
Date:
March, 2001
File:
PDF, 103 KB
english, 2001