Electron transport coefficients in mixtures of CF...

Plasma Sources Science and Technology 2009 / 08 Vol. 18; Iss. 3

Electron transport coefficients in mixtures of CF 4 and CF 2 radicals

Nikitović, Željka D, Stojanović, Vladimir D, Booth, Jean Paul, Petrović, Zoran Lj
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/18/3/035008
Date:
August, 2009
File:
PDF, 459 KB
english, 2009
Conversion to is in progress
Conversion to is failed