[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Realization and application of nanometer E-beam lithography system
Shuhua, Wei, Lan, Dai, Jing, ZhangYear:
2013
Language:
english
DOI:
10.1109/INEC.2013.6465985
File:
PDF, 538 KB
english, 2013