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Influence exerted by the plasma edge potential on recycling, sputtering and impurity accumulation
L. Oren, L. Keller, F. Schwirzke, S. Talmadge, R.J. TaylorVolume:
111-112
Year:
1982
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(82)90177-5
File:
PDF, 402 KB
english, 1982