Low-temperature deposition of TaB and TaB2 by chemical vapor deposition
Seiji Motojima, Kazuhito Kito, Kohzo SugiyamaVolume:
105
Year:
1982
Language:
english
Pages:
7
DOI:
10.1016/0022-3115(82)90383-x
File:
PDF, 698 KB
english, 1982