Arsenic implantation into polycrystalline silicon and...

Arsenic implantation into polycrystalline silicon and diffusion to silicon substrate

Tsukamoto, Katsuhiro, Akasaka, Youichi, Horie, Kazuo
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Volume:
48
Year:
1977
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.323933
File:
PDF, 794 KB
english, 1977
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