Preparation of titanium nitride onto molybdenum, stainless steel and carbon by gas absorption and reactive r.f. sputtering
Kazuhiko Sato, Mamoru Mohri, Toshiro Yamashina, Katsumasa YabeVolume:
103
Year:
1981
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(82)90610-9
File:
PDF, 447 KB
english, 1981