SPIE Proceedings [SPIE Electronic Imaging '97 - San Jose, CA (Saturday 8 February 1997)] Active Matrix Liquid Crystal Displays Technology and Applications - Ion shower doping system for TFT-LCDs
Nakamoto, Ichiro, Kuwabara, Hajime, Kawasaki, Yoshinori, Voutsas, Tolis, King, Tsu-JaeVolume:
3014
Year:
1997
Language:
english
DOI:
10.1117/12.270297
File:
PDF, 289 KB
english, 1997