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[IEEE 2006 International Electron Devices Meeting - San Francisco, CA, USA (2006.12.11-2006.12.13)] 2006 International Electron Devices Meeting - Impact of Stochastic Mismatch on Measured SRAM Performance of FinFETs with Resist/Spacer-Defined Fins: Role of Line-Edge-Roughness
Dixit, A., Anil, K. G., Baravelli, E., Roussel, P., Mercha, A., Gustin, C., Bamal, M., Grossar, E., Rooyackers, R., Augendre, E., Jurczak, M., Biesemans, S., De Meyer, K.Year:
2006
Language:
english
DOI:
10.1109/IEDM.2006.346884
File:
PDF, 278 KB
english, 2006