A monitor for discharge cleaning using microwave...

A monitor for discharge cleaning using microwave spectroscopy

Motoi Mushiaki, Yasuyuki Funato, Yusuke Kubota, Akira Miyahara
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Volume:
128-129
Year:
1984
Language:
english
Pages:
3
DOI:
10.1016/0022-3115(84)90475-6
File:
PDF, 279 KB
english, 1984
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