SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 21 January 2012)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII - Formation of tribological structures by laser ablation
Schilling, Niels, Paschke, Mike, Hendow, Sami T., Klotzbach, Udo, Hennig, Guido, Xu, Xianfan, Gu, Bo, Nakata, YoshikiVolume:
8243
Year:
2012
Language:
english
DOI:
10.1117/12.908940
File:
PDF, 4.06 MB
english, 2012