[IEEE 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2012.09.19-2012.09.21)] 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Low actuation voltage through three electrodes topology for RF MEMS capacitive switch
Ramli, Norhaslinawati, Sidek, Othman, Amir, M.Year:
2012
Language:
english
DOI:
10.1109/SMElec.2012.6417098
File:
PDF, 1005 KB
english, 2012