CMOS-Compatible Fabrication of Silicon-Based Sub-100-nm...

CMOS-Compatible Fabrication of Silicon-Based Sub-100-nm Slot Waveguide With Efficient Channel-Slot Coupler

Zhang, Huijuan, Zhang, Jing, Chen, Shiyi, Song, Junfeng, Kee, Jack Sheng, Yu, Mingbin, Lo, Guo-Qiang
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Volume:
24
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/LPT.2011.2171936
Date:
January, 2012
File:
PDF, 694 KB
english, 2012
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