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Dynamic response of an electrostatically actuated microbeam to drop-table test
Ouakad, Hassen M, Younis, Mohammad I, Alsaleem, FadiVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/9/095003
Date:
September, 2012
File:
PDF, 588 KB
english, 2012