Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array
Wang, Wen Chuang, Tian, Yong Tao, Li, Kun, Lu, Er Yang, Gong, Dong Shang, Li, Xin JianVolume:
273
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.02.045
Date:
May, 2013
File:
PDF, 751 KB
english, 2013