Deposition of nanocrystalline diamond films on silicon...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

Deposition of nanocrystalline diamond films on silicon nitride ceramic substrates using pulsed microwave discharges in Ar/H2/CH4 gas mixture

Bruno, P., Bénédic, F., Tallaire, A., Silva, F., Oliveira, F.J., Amaral, M., Fernandes, A.J.S., Cicala, G., Silva, R.F.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.10.023
Date:
March, 2005
File:
PDF, 419 KB
english, 2005
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