Focused ion beam technology and applications

Focused ion beam technology and applications

Melngailis, John
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Volume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.583937
Date:
March, 1987
File:
PDF, 3.34 MB
english, 1987
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