Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1987 / 3 Vol. 5; Iss. 2
Focused ion beam technology and applications
Melngailis, JohnVolume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.583937
Date:
March, 1987
File:
PDF, 3.34 MB
english, 1987