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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - High aspect ratio etching of nanopores in PECVD SiC through AAO mask
Wu, Songmei, Bammatter, Marc-Oliver, Tang, Wei, Auzelyte, Vaida, Zhang, Haixia, Brugger, JuergenYear:
2013
Language:
english
DOI:
10.1109/NEMS.2013.6559887
File:
PDF, 1.21 MB
english, 2013