Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
High temperature focused ion beam response of graphite resulting in spontaneous nanosheet formation
Langegger, Rupert, Lugstein, Alois, Glaser, Markus, Bertagnolli, Emmerich, Steiger-Thirsfeld, AndreasVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3661994
File:
PDF, 1.56 MB
english, 2011