High temperature focused ion beam response of graphite...

High temperature focused ion beam response of graphite resulting in spontaneous nanosheet formation

Langegger, Rupert, Lugstein, Alois, Glaser, Markus, Bertagnolli, Emmerich, Steiger-Thirsfeld, Andreas
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3661994
File:
PDF, 1.56 MB
english, 2011
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