[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Characterization of reversed c-axis AlN thin films
Larson, John D., Mishin, Sergey, Bader, StefanYear:
2010
Language:
english
DOI:
10.1109/ULTSYM.2010.5935971
File:
PDF, 1.46 MB
english, 2010