[IEEE 2008 33rd IEEE Photovolatic Specialists Conference (PVSC) - San Diego, CA, USA (2008.05.11-2008.05.16)] 2008 33rd IEEE Photovolatic Specialists Conference - Effect of process parameters on the properties of diamond like carbon films deposition by microwave surface-wave plasma CVD
Ghimire, Dilip Chandra, Adhikari, Sudip, Aryal, Hare Ram, Kalit, Golap, Uchida, Hideo, Umeno, MasayoshiYear:
2008
Language:
english
DOI:
10.1109/PVSC.2008.4922561
File:
PDF, 1018 KB
english, 2008