Realization of Thin Film Encapsulation by Atomic Layer...

The Journal of Physical Chemistry C 2013 / 10 Vol. 117; Iss. 39

Realization of Thin Film Encapsulation by Atomic Layer Deposition of Al 2 O 3 at Low Temperature

Yang, Yong-Qiang, Duan, Yu, Chen, Ping, Sun, Feng-Bo, Duan, Ya-Hui, Wang, Xiao, Yang, Dan
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Volume:
117
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp406738h
Date:
October, 2013
File:
PDF, 3.86 MB
english, 2013
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