Selective nucleation induced by defect nanostructures: A way to control cobalt disilicide precipitation during ion implantation
Fortuna, F., Nguyen, M.-A., Ruault, M.-O., Kirk, M. A., Borodin, V. A., Ganchenkova, M. G.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4769213
File:
PDF, 4.88 MB
english, 2012