Microstructure and stress in nano-crystalline diamond films deposited by DC glow discharge CVD
Heiman, A., Lakin, E., Zolotoyabko, E., Hoffman, A.Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00631-8
Date:
March, 2002
File:
PDF, 283 KB
english, 2002