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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - High-performance MEMS relay using a stacked-electrode structure and a levering and torsional spring for power applications
Song, Yong-Ha, Han, Chang-Hoon, Kim, Min-Wu, Lee, Jeong Oen, Yoon, Jun-BoYear:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170099
File:
PDF, 1.77 MB
english, 2012