Determination of pull-off forces of textured silicon surfaces by AFM force curve analysis
Bachmann, Daniel, Hierold, ChristoferVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/015
Date:
July, 2007
File:
PDF, 690 KB
english, 2007