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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Robust silicon deep etching without thermal isolation in large mass and long spring structures
Lee, Yong-Seok, Jang, Yun-Ho, Kim, Jung-Mu, Kim, Yong-KweonYear:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170158
File:
PDF, 1.49 MB
english, 2012