Photoconduction in silicon rich oxide films obtained by low pressure chemical vapor deposition
Luna-LoÌpez, J. A., Aceves-Mijares, M., Carrillo-LoÌpez, J., Morales-SaÌnchez, A.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3276781
File:
PDF, 687 KB
english, 2010