Photoconduction in silicon rich oxide films obtained by low...

Photoconduction in silicon rich oxide films obtained by low pressure chemical vapor deposition

Luna-López, J. A., Aceves-Mijares, M., Carrillo-López, J., Morales-Sánchez, A.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3276781
File:
PDF, 687 KB
english, 2010
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