[IEEE Proceedings of 2002 American Control Conference - Anchorage, AK, USA (2002.5.8-2002.5.10)] Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301) - Design, identification and control of a fast nanopositioning device
Salapaka, S., Sebastian, A., Cleveland, J.P., Salapaka, M.V.Year:
2002
Language:
english
DOI:
10.1109/ACC.2002.1023923
File:
PDF, 614 KB
english, 2002