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CMOS-compatible ruggedized high-temperature Lamb wave pressure sensor
Kropelnicki, P, Muckensturm, K-M, Mu, X J, Randles, A B, Cai, H, Ang, W C, Tsai, J M, Vogt, HVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/8/085018
Date:
August, 2013
File:
PDF, 1.49 MB
english, 2013