CMOS-compatible ruggedized high-temperature Lamb wave...

Journal of Micromechanics and Microengineering 2013 / 08 Vol. 23; Iss. 8

CMOS-compatible ruggedized high-temperature Lamb wave pressure sensor

Kropelnicki, P, Muckensturm, K-M, Mu, X J, Randles, A B, Cai, H, Ang, W C, Tsai, J M, Vogt, H
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/8/085018
Date:
August, 2013
File:
PDF, 1.49 MB
english, 2013
Conversion to is in progress
Conversion to is failed