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Comparison of the thermal stability of the codeposited carbon/hydrogen layer to that of the saturated implant layer
R.A. Causey, W.R. Wampler, D. WalshVolume:
176-177
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(90)90179-q
File:
PDF, 446 KB
english, 1990