Growth Induced Stacking Fault Formation in 4H-SiC

Growth Induced Stacking Fault Formation in 4H-SiC

Siche, D., Albrecht, M., Rost, H. J., Sendzik, Andreas
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Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.21
File:
PDF, 967 KB
english, 2007
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