Growth and Electrical Characterization of 4H-SiC Epilayers
Kimoto, Tsunenobu, Danno, Katsunori, Hori, T., Matsunami, HiroyukiVolume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.35
File:
PDF, 447 KB
english, 2007