[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A pneumatic neural probe structure fabricated by parylene thermal bonding technique
Yen, Yu-Chang, Lee, Yu-Tao, Chang, Yen-Chung, Fang, WeileunYear:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170213
File:
PDF, 1.63 MB
english, 2012