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Architectural Effects on Acid Reaction-Diffusion Kinetics in Molecular Glass Photoresists
Sha, Jing, Lee, Jin-Kyun, Kang, Shuhui, Prabhu, Vivek M., Soles, Christopher L., Bonnesen, Peter V., Ober, Christopher K.Volume:
22
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm9038939
Date:
May, 2010
File:
PDF, 1.49 MB
english, 2010