Helium irradiation effects on structural properties of A1N...

Journal of Nuclear Materials 1991 Vol. 179-181; Iss. part-P1

Helium irradiation effects on structural properties of A1N thin films

N. Kobayashi, H. Kobayashi, I. Sakamoto, N. Hayashi
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Volume:
179-181
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0022-3115(91)90126-r
File:
PDF, 414 KB
english, 1991
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