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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Influences of specimen size and deformation mode on the strength of single-crystal silicon micro-beam structures
Yamagiwa, H., Fujii, T., Namazu, T., Saito, M., Yamada, K., Miyatake, T.Year:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170221
File:
PDF, 1.76 MB
english, 2012