An (ultra) high-vacuum compatible sputter source for oxide...

An (ultra) high-vacuum compatible sputter source for oxide thin film growth

Mayr, Lukas, Köpfle, Norbert, Auer, Andrea, Klötzer, Bernhard, Penner, Simon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4821148
File:
PDF, 1.59 MB
english, 2013
Conversion to is in progress
Conversion to is failed