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An (ultra) high-vacuum compatible sputter source for oxide thin film growth
Mayr, Lukas, Köpfle, Norbert, Auer, Andrea, Klötzer, Bernhard, Penner, SimonVolume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4821148
File:
PDF, 1.59 MB
english, 2013