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[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - High frequency SAW-IDT MEMS sensors for ultrasonic characterization of thin films deposited on substrates
Duquennoy, M., Ouaftouh, M., Deboucq, J., Jenot, F., Ourak, M., Carlier, J., Moulin, E.Year:
2012
Language:
english
DOI:
10.1109/ULTSYM.2012.0432
File:
PDF, 658 KB
english, 2012