Diagnostics of a N[sub 2]/Ar direct current magnetron...

Journal of Applied Physics 2003 Vol. 94; Iss. 11

Diagnostics of a N[sub 2]/Ar direct current magnetron discharge for reactive sputter deposition of fullerene-like carbon nitride thin films

Neidhardt, J., Hultman, L., Abendroth, B., Gago, R., Möller, W.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1625091
File:
PDF, 393 KB
english, 2003
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