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[IEEE ESSDERC 2008 - 38th European Solid-State Device Research Conference - Edinburgh, UK (2008.09.15-2008.09.19)] ESSDERC 2008 - 38th European Solid-State Device Research Conference - On the stability of fully depleted SOI MOSFETs under lithography process variations
Kampen, Christian, Fuhner, Tim, Burenkov, Alexander, Erdmann, Andreas, Lorenz, Jurgen, Ryssel, HeinerYear:
2008
Language:
english
DOI:
10.1109/ESSDERC.2008.4681731
File:
PDF, 1.79 MB
english, 2008