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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectric micro-scale mechanical computing system
Proie, Robert M., Pulskamp, Jeffrey S., Polcawich, Ronald G., Ivanov, TonyYear:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170243
File:
PDF, 1.16 MB
english, 2012