Influence of low-energy bombardment of an RF magnetron...

Influence of low-energy bombardment of an RF magnetron sputtering discharge on texture formation and stress in ZnO films

R. Kaltofen, G. Weise
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Volume:
200
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(93)90312-m
File:
PDF, 447 KB
english, 1993
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