Deposition of hydrogenated carbon layers from CH3+ ion...

Journal of Nuclear Materials 1995 Vol. 220-222; Iss. none

Deposition of hydrogenated carbon layers from CH3+ ion beams

Wenmin Wang, W. Eckstein, R. Schwörer, H. Plank, J. Roth
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Volume:
220-222
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(94)00468-4
File:
PDF, 413 KB
english, 1995
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