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Microelectromechanical capacitors for RF applications
Nieminen, H, Ermolov, V, Nybergh, K, Silanto, S, Ryhänen, TVolume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/2/312
Date:
March, 2002
File:
PDF, 653 KB
english, 2002