Erosion of a-B/C : H films under deuterium plasma...

Erosion of a-B/C : H films under deuterium plasma irradiation

V.M. Sharapov, A.I. Kanaev, S.Yu. Rybakov, L.E. Gavrilov
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Volume:
220-222
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0022-3115(94)00614-8
File:
PDF, 280 KB
english, 1995
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