[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic SU-8 based hollow waveguide with integrated electro thermally tunable iris filter for W-band applications
Kohlstedt, A., Dassinger, F., Schlaak, F., Fritzsch, C., Jakoby, R.Year:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170286
File:
PDF, 1.59 MB
english, 2012