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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes
Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V., Vigevani, Gabriele, Senesky, Debbie G., Pisano, Albert P.Year:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170290
File:
PDF, 2.12 MB
english, 2012